Mechanisms of sputtered atoms energy spectra formation during ejection: Computer simulation study for two-component targets
V.N. Samoilov, O.S. Korsakova, A.E. TaturVolume:
47
Year:
1996
Language:
english
Pages:
9
DOI:
10.1016/s0042-207x(96)00209-6
File:
PDF, 1.07 MB
english, 1996