‘All-dry’ and in situ microstructuring of carbide/polyimide...

Vacuum 1997 Vol. 48; Iss. 1

‘All-dry’ and in situ microstructuring of carbide/polyimide layers

G Danev, E Spassova, K Petkov, J Assa, J Ihleman, B Wolf-Rottke
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Volume:
48
Year:
1997
Language:
english
Pages:
5
DOI:
10.1016/s0042-207x(96)00231-x
File:
PDF, 432 KB
english, 1997
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