A modified method for arc deposition of Ti-N thin films

A modified method for arc deposition of Ti-N thin films

J Kourtev, R Pascova, E Weiβmantel
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Volume:
48
Year:
1997
Language:
english
Pages:
6
DOI:
10.1016/s0042-207x(96)00232-1
File:
PDF, 695 KB
english, 1997
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