Carbon nitride thin films formation by N2+ ion implantation
C Palacio, C Gómez-Aleixandre, D Díaz, MM GarcíaVolume:
48
Year:
1997
Language:
english
Pages:
5
DOI:
10.1016/s0042-207x(97)00036-5
File:
PDF, 467 KB
english, 1997