Production of ultrahigh vacuum by helium glow discharge cleaning in an unbaked vacuum chamber
K Akaishi, K Ezaki, O Motojima, M NakasugaVolume:
48
Year:
1997
Language:
english
Pages:
4
DOI:
10.1016/s0042-207x(97)00041-9
File:
PDF, 417 KB
english, 1997