Production of ultrahigh vacuum by helium glow discharge...

Production of ultrahigh vacuum by helium glow discharge cleaning in an unbaked vacuum chamber

K Akaishi, K Ezaki, O Motojima, M Nakasuga
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Volume:
48
Year:
1997
Language:
english
Pages:
4
DOI:
10.1016/s0042-207x(97)00041-9
File:
PDF, 417 KB
english, 1997
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