Magnetron sputtering system stabilisation for high rate...

Magnetron sputtering system stabilisation for high rate deposition of AlN films

Alexey A Fomin, Vladislav Akhmatov, Sergey V Selishchev
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Volume:
49
Year:
1998
Language:
english
Pages:
5
DOI:
10.1016/s0042-207x(97)00164-4
File:
PDF, 574 KB
english, 1998
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