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Magnetron sputtering system stabilisation for high rate deposition of AlN films
Alexey A Fomin, Vladislav Akhmatov, Sergey V SelishchevVolume:
49
Year:
1998
Language:
english
Pages:
5
DOI:
10.1016/s0042-207x(97)00164-4
File:
PDF, 574 KB
english, 1998