Preparation of WSI2 by rapid thermal annealing of CVD thin...

Vacuum 1998 Vol. 51; Iss. 2

Preparation of WSI2 by rapid thermal annealing of CVD thin films of tungsten

KA Gesheva, DS Gogova, GD Beshkov, V Popov
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Volume:
51
Year:
1998
Language:
english
Pages:
4
DOI:
10.1016/s0042-207x(98)00155-9
File:
PDF, 431 KB
english, 1998
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