Effects of high dose Bi+ implantation on Si : An atomic...

Vacuum 1998 Vol. 51; Iss. 2

Effects of high dose Bi+ implantation on Si : An atomic force and transmission electron microscopy study

Ch Angelov, J Faure, M Kalitzova, S Simov, T Tzvetkova, A Djakov
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Volume:
51
Year:
1998
Language:
english
Pages:
4
DOI:
10.1016/s0042-207x(98)00176-6
File:
PDF, 793 KB
english, 1998
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