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Spectroscopic study and modelling of a reactive magnetron discharge in Ar/O2 and in air
M Touzeau, D Pagnon, J BretagneVolume:
52
Year:
1999
Language:
english
Pages:
8
DOI:
10.1016/s0042-207x(98)00226-7
File:
PDF, 775 KB
english, 1999