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Reactively DC magnetron sputtered thin AlN films studied by X-ray photoelectron spectroscopy and polarised infrared reflection
D. Manova, V. Dimitrova, D. Karpuzov, R. YankovVolume:
52
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0042-207x(98)00303-0
File:
PDF, 324 KB
english, 1999