Experimental verification of theory for the pumping...

Vacuum 1999 Vol. 53; Iss. 1-2

Experimental verification of theory for the pumping mechanism of a dry-scroll vacuum pump

Tadashi Sawada, Shin Kamada, Wataru Sugiyama, Jun-ichi Takemoto, Shuji Haga, Masaru Tsuchiya
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Volume:
53
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0042-207x(98)00383-2
File:
PDF, 199 KB
english, 1999
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