Accurate electrical measurements for in situ diagnosis of RF discharges in plasma CVD processes
G. Viera, J. Costa, F.J. Compte, E. Garćı́a-Sanz, J.L. Andújar, E. BertranVolume:
53
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0042-207x(98)00410-2
File:
PDF, 135 KB
english, 1999