Investigation of the tribological behavior of octadecyltrichlorosilane deposited on silicon
Kum-Hwan Cha, Dae-Eun KimVolume:
251
Year:
2001
Language:
english
Pages:
8
DOI:
10.1016/s0043-1648(01)00729-3
File:
PDF, 281 KB
english, 2001