High-quality grinding of polycrystalline silicon carbide...

High-quality grinding of polycrystalline silicon carbide spherical surfaces

Ling Yin, E.Y.J Vancoille, L.C Lee, H Huang, K Ramesh, X.D Liu
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Volume:
256
Year:
2004
Language:
english
Pages:
11
DOI:
10.1016/s0043-1648(03)00406-x
File:
PDF, 799 KB
english, 2004
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