Vertical differential displacements at a pad/sapphire...

Vertical differential displacements at a pad/sapphire interface during polishing

F. Mess, J. Levert, S. Danyluk
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Volume:
211
Year:
1997
Pages:
5
DOI:
10.1016/s0043-1648(97)00113-0
File:
PDF, 336 KB
1997
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