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Effect of slurry viscosity modification on oxide and tungsten CMP
G.S. Grover, H. Liang, S. Ganeshkumar, W. FortinoVolume:
214
Year:
1998
Language:
english
Pages:
4
DOI:
10.1016/s0043-1648(97)00219-6
File:
PDF, 270 KB
english, 1998