Effect of thermal oxidation on indentation and scratching of single-crystal silicon carbide on microscale
Klaus Pöhlmann, Bharat Bhushan, Karl-Heinz Zum GahrVolume:
237
Year:
2000
Language:
english
Pages:
13
DOI:
10.1016/s0043-1648(99)00318-x
File:
PDF, 1.23 MB
english, 2000