![](/img/cover-not-exists.png)
CMOS-MEMS Test-Key for Extracting Wafer-Level Mechanical Properties
Chuang, Wan-Chun, Hu, Yuh-Chung, Chang, Pei-ZenVolume:
12
Language:
english
Journal:
Sensors
DOI:
10.3390/s121217094
Date:
December, 2012
File:
PDF, 567 KB
english, 2012