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Micro Ethanol Sensors with a Heater Fabricated Using the Commercial 0.18 μm CMOS Process
Liao, Wei-Zhen, Dai, Ching-Liang, Yang, Ming-ZhiVolume:
13
Language:
english
Journal:
Sensors
DOI:
10.3390/s131012760
Date:
September, 2013
File:
PDF, 1016 KB
english, 2013