A Novel Micro-Hotplate Designed for Micro-Gas Sensor

A Novel Micro-Hotplate Designed for Micro-Gas Sensor

Li, Ji, Zhang, Xiao Bo, Liu, Li
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Volume:
411-414
Language:
english
Journal:
Applied Mechanics and Materials
DOI:
10.4028/www.scientific.net/amm.411-414.1569
Date:
September, 2013
File:
PDF, 381 KB
english, 2013
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