Axial Magnetic Field Distribution Simulation and Optimization in Rotating Magnetron Sputtering System
Zhang, Ruo Fan, Wang, Ren Cheng, Cheng, Jia, Lu, Yi JiaVolume:
697
Language:
english
Journal:
Applied Mechanics and Materials
DOI:
10.4028/www.scientific.net/amm.697.382
Date:
November, 2014
File:
PDF, 544 KB
english, 2014