A Differential Capacitive Accelerometer with Four Folded...

Advanced Materials Research 2012 / 1 Vol. 457-458

A Differential Capacitive Accelerometer with Four Folded Springs and Changeable Area

Dong, Wei, Zhou, Jing Ran, Guo, Wen Bin, Zhang, Xin Dong, Liu, Cai Xia, Shen, Liang, Ruan, Sheng Ping, Chen, Wei You
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Volume:
457-458
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/amr.457-458.1470
Date:
January, 2012
File:
PDF, 362 KB
english, 2012
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