Preparation of Pure Anatase TiO2 Thin Films by DC Sputtering Technique: Study on the Effect of Oxygen Partial Pressure
Pansila, P. Pungboon, Witit-Anun, Nirun, Jamnongkan, Tongsai, Chaiyakun, SurasingVolume:
463-464
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/amr.463-464.1415
Date:
February, 2012
File:
PDF, 1.08 MB
english, 2012