Effects of Power on Microstructure and Hardness of Sputtered TiB2 Films
Xia, Mu Jian, Ding, Hong Yan, Zhou, Guang Hong, Zhang, Yue, Zhuang, Guo ZhiVolume:
647
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/amr.647.697
Date:
January, 2013
File:
PDF, 327 KB
english, 2013