Effects of External Hydrostatic Pressure on Finished...

Advanced Materials Research 2014 / 6 Vol. 966-967

Effects of External Hydrostatic Pressure on Finished Surface in Silicon Cutting

Yoshino, Masahiko, Shimizu, Yohei, Kono, Kentaro, Terano, Motoki
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Volume:
966-967
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/amr.966-967.129
Date:
June, 2014
File:
PDF, 1.36 MB
english, 2014
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