Hydrogen Effect on Structure and Mechanical Properties of ZnO Films Deposited in Ar/H2 Plasma
Bartali, Ruben, Micheli, V., Gottardi, G., Luciu, I., Laidani, N.Volume:
66
Language:
english
Journal:
Advances in Science and Technology
DOI:
10.4028/www.scientific.net/ast.66.156
Date:
October, 2010
File:
PDF, 285 KB
english, 2010