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Fe Ions Diffusion and Oxygen Complexes Evolution during Thermodonors Annealing in B-Doped Czochralsky Silicon Crystal
Skidanov, VladimirVolume:
297-301
Language:
english
Journal:
Defect and Diffusion Forum
DOI:
10.4028/www.scientific.net/ddf.297-301.495
Date:
April, 2010
File:
PDF, 345 KB
english, 2010