Formation of PZT Thin Films on 6-Inch Wafers by Liquid...

Key Engineering Materials 2004 Vol. 264-268

Formation of PZT Thin Films on 6-Inch Wafers by Liquid Delivery Metalorganic Chemical Vapor Deposition

Otani, Y., Okamura, Soichiro, Shiosaki, Tadashi
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Volume:
264-268
Year:
2004
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/kem.264-268.459
File:
PDF, 396 KB
english, 2004
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