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A Comparison of Dry and Underwater Laser Micromachining of Silicon Substrates
Tangwarodomnukun, Viboon, Wang, Jun, Mathew, PhilipVolume:
443
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/kem.443.693
Date:
June, 2010
File:
PDF, 851 KB
english, 2010