![](/img/cover-not-exists.png)
Design and Analysis of a Monolithic 3-Axis Micro-Accelerometer
Wang, Xing Hua, Chen, Zhi Hua, Xiao, Ding Bang, Wu, Xue ZhongVolume:
503
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/kem.503.122
Date:
February, 2012
File:
PDF, 468 KB
english, 2012