Epitaxial Growth of 6H-SiC by a Vapor Liquid Solid Method

Materials Science Forum 2003 Vol. 433-436

Epitaxial Growth of 6H-SiC by a Vapor Liquid Solid Method

Ferret, Pierre, Leray, A., Feuillet, G., Lyan, P., Pudda, C., Billon, Thierry
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Volume:
433-436
Year:
2003
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.433-436.201
File:
PDF, 433 KB
english, 2003
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