Towards an Improved Megasonic Cleaning Process: Influence...

Solid State Phenomena 2012 / 12 Vol. 195

Towards an Improved Megasonic Cleaning Process: Influence of Surface Tension on Bubble Activity in Acoustic Fields

Camerotto, Elisabeth, Brems, Steven, Hauptmann, Marc, Lurquin, Jelle, Struyf, Herbert, Mertens, Paul W., de Gendt, Stefan
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Volume:
195
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/ssp.195.173
Date:
December, 2012
File:
PDF, 403 KB
english, 2012
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