Multi-cusp ion source for doping process of flat panel...

Review of Scientific Instruments 2014 / 02 Vol. 85; Iss. 2

Multi-cusp ion source for doping process of flat panel display manufacturinga)

Inouchi, Yutaka, Matsumoto, Takeshi, Dohi, Shojiro, Tanii, Masahiro, Takahashi, Genki, Nishimura, Ippei, Tatemichi, Junichi, Konishi, Masashi, Naito, Masao
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Volume:
85
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.4855017
Date:
February, 2014
File:
PDF, 738 KB
english, 2014
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