Theoretical analysis of surface stress for a...

Journal of Physics D Applied Physics 2008 / 03 Vol. 41; Iss. 6

Theoretical analysis of surface stress for a microcantilever with varying widths

Li, Xian-Fang, Peng, Xu-Long
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Volume:
41
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/41/6/065301
Date:
March, 2008
File:
PDF, 463 KB
english, 2008
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