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Characteristics of the ZnO thin film transistor by atomic layer deposition at various temperatures
Kwon, Semyung, Bang, Seokhwan, Lee, Seungjun, Jeon, Sunyeol, Jeong, Wooho, Kim, Hyungchul, Gong, Su Cheol, Chang, Ho Jung, Park, Hyung-ho, Jeon, HyeongtagVolume:
24
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/24/3/035015
Date:
March, 2009
File:
PDF, 452 KB
english, 2009