Effect of sodium on Ga and As chemical states in the...

Semiconductor Science and Technology 1993 / 12 Vol. 8; Iss. 12

Effect of sodium on Ga and As chemical states in the surface layer of GaAs polished with NaOCl

Sokolov, I A, Kozlov, V V, Tkalich, A K
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Volume:
8
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/8/12/024
Date:
December, 1993
File:
PDF, 185 KB
english, 1993
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