Fabrication of precision 3D microstructures by use of a combination of ultraprecision diamond turning and reactive ion etching process
Chen, Yang, Li, Lei, Yi, Allen YVolume:
17
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/17/5/006
Date:
May, 2007
File:
PDF, 666 KB
english, 2007