Faster and exact implementation of the continuous cellular...

Faster and exact implementation of the continuous cellular automaton for anisotropic etching simulations

Ferrando, N, Gosálvez, M A, Cerdá, J, Gadea, R, Sato, K
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Volume:
21
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/21/2/025021
Date:
February, 2011
File:
PDF, 14.50 MB
english, 2011
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