Faster and exact implementation of the continuous cellular automaton for anisotropic etching simulations
Ferrando, N, Gosálvez, M A, Cerdá, J, Gadea, R, Sato, KVolume:
21
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/21/2/025021
Date:
February, 2011
File:
PDF, 14.50 MB
english, 2011