![](/img/cover-not-exists.png)
Theoretical overview of the large-area plasma processing system (LAPPS)
Manheimer, Wallace M, Fernsler, Richard F, Lampe, Martin, Meger, Robert AVolume:
9
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/9/3/316
Date:
August, 2000
File:
PDF, 325 KB
english, 2000