Theoretical overview of the large-area plasma processing...

Plasma Sources Science and Technology 2000 / 08 Vol. 9; Iss. 3

Theoretical overview of the large-area plasma processing system (LAPPS)

Manheimer, Wallace M, Fernsler, Richard F, Lampe, Martin, Meger, Robert A
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Volume:
9
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/9/3/316
Date:
August, 2000
File:
PDF, 325 KB
english, 2000
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