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[IEEE SCS 2003 International Symposium on Signals Circuits and Systems Proceedings (Cat No 03EX720) IIT-02 - Taos, New Mexico, USA (2002.09.27-2002.09.27)] SCS 2003 International Symposium on Signals Circuits and Systems Proceedings (Cat No 03EX720) IIT-02 - Introduction of the new high voltage, engineering (HVE) accelerator for high energy/high current ion implantation
Koudijs,, Gottdang,, Mous,Year:
2002
Language:
english
DOI:
10.1109/IIT.2002.1258050
File:
PDF, 402 KB
english, 2002