SPIE Proceedings [SPIE MOEMS-MEMS 2007 Micro and...

  • Main
  • SPIE Proceedings [SPIE MOEMS-MEMS 2007...

SPIE Proceedings [SPIE MOEMS-MEMS 2007 Micro and Nanofabrication - San Jose, CA (Saturday 20 January 2007)] Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII - Combined nano-imprint and photolithography (CNP) of integrated polymer optics

Christiansen, Mads B., Schøler, Mikkel, Kristensen, Anders, Maher, Mary-Ann, Stewart, Harold D., Chiao, Jung-Chih, Suleski, Thomas J., Johnson, Eric G., Nordin, Gregory P.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
6462
Year:
2007
Language:
english
DOI:
10.1117/12.698541
File:
PDF, 1.51 MB
english, 2007
Conversion to is in progress
Conversion to is failed