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SPIE Proceedings [SPIE MOEMS-MEMS 2007 Micro and Nanofabrication - San Jose, CA (Saturday 20 January 2007)] Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII - Combined nano-imprint and photolithography (CNP) of integrated polymer optics
Christiansen, Mads B., Schøler, Mikkel, Kristensen, Anders, Maher, Mary-Ann, Stewart, Harold D., Chiao, Jung-Chih, Suleski, Thomas J., Johnson, Eric G., Nordin, Gregory P.Volume:
6462
Year:
2007
Language:
english
DOI:
10.1117/12.698541
File:
PDF, 1.51 MB
english, 2007