[ECS 212th ECS Meeting - Washington, DC (October 7 -...

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[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - Interface Reaction of High-k Gate Stack Structures Observed by High-Resolution RBS

Zhao, Ming, Nakajima, Kaoru, Suzuki, Motofumi, Kimura, Kenji, Uematsu, Masashi, Torii, Kazuyoshi, Kamiyama, Satoshi, Nara, Yasuo, Watanabe, Heiji, Shiraishi, Kenji, Chikyow, Toyohiro, Yamada, Keisaku
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Volume:
11
Year:
2007
Language:
english
DOI:
10.1149/1.2779552
File:
PDF, 462 KB
english, 2007
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