Good Conformability of Indium-Tin Oxide Thin Films Prepared by Spray Chemical Vapor Deposition
Kondo, Takeshi, Sawada, Yutaka, Funakubo, Hiroshi., Akiyama, Kensuke, Kiguchi, Takanori, Wang, Meihan, Uchida, TakayukiVolume:
12
Year:
2009
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.3091259
File:
PDF, 373 KB
english, 2009