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[ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] ECS Transactions - Development of an Automatic Modeling System for Reaction Mechanisms in CVD Processes
Takahashi, Takahiro, Ema, YoshinoriYear:
2009
Language:
english
DOI:
10.1149/1.3207629
File:
PDF, 358 KB
english, 2009