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ECS Transactions [ECS China Semiconductor Technology International Conference 2010 (CSTIC 2010) - Shanghai, China (March 18 - March 19, 2010)] - Fluorine IMP Effect on Negative Bias Temperature Instability and Process Induced Defects
Zhou, Allan, Liu, Jinhua, Zheng, K., Ju, Jianhua, Zhang, Jing, Gan, Z.-H., Ho, H.-M., Ning, X.-J.Year:
2010
Language:
english
DOI:
10.1149/1.3360597
File:
PDF, 201 KB
english, 2010