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Crystallographic Texture of Submicron Thin Aluminum Nitride Films on Molybdenum Electrode for Suspended Micro and Nanosystems
Sah, R. E., Kirste, L., Kirmse, H., Mildner, M., Wilde, L., Kopta, S., Knobber, F., Krieg, M., Cimalla, V., Lebedev, V., Ambacher, O.Volume:
2
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.001305jss
Date:
February, 2013
File:
PDF, 869 KB
english, 2013