Crystallographic Texture of Submicron Thin Aluminum Nitride...

ECS Journal of Solid State Science and Technology 2013 / 02 Vol. 2; Iss. 4

Crystallographic Texture of Submicron Thin Aluminum Nitride Films on Molybdenum Electrode for Suspended Micro and Nanosystems

Sah, R. E., Kirste, L., Kirmse, H., Mildner, M., Wilde, L., Kopta, S., Knobber, F., Krieg, M., Cimalla, V., Lebedev, V., Ambacher, O.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
2
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.001305jss
Date:
February, 2013
File:
PDF, 869 KB
english, 2013
Conversion to is in progress
Conversion to is failed