Sensitivity and Response of a Triple-Axis Thermal MEMS-Based Acceleration Sensor
Dinh, Xuan Thien, Ogami, YoshifumiVolume:
339
Language:
english
Journal:
Applied Mechanics and Materials
DOI:
10.4028/www.scientific.net/AMM.339.64
Date:
July, 2013
File:
PDF, 522 KB
english, 2013