The CMP Cross-Correlation Method and its Limitation

The CMP Cross-Correlation Method and its Limitation

Lu, Jian Qi, Li, Shan You, Li, Wei
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Volume:
353-356
Language:
english
Journal:
Applied Mechanics and Materials
DOI:
10.4028/www.scientific.net/AMM.353-356.2153
Date:
August, 2013
File:
PDF, 2.55 MB
english, 2013
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