Effect of Surface Profile on the Material Removal Rate...

Effect of Surface Profile on the Material Removal Rate Distribution in CMP Process

Zhou, Ping, Cai, Ji Qing, Li, Zhi Wei, Kang, Ren Ke, Jin, Zhu Ji
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Volume:
1017
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.1017.715
Date:
September, 2014
File:
PDF, 402 KB
english, 2014
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