Changes in the Spectral Characteristics of Aluminum Films Deposited under Assisting Argon Ion Beam
Umnov, Sergey P., Asainov, Oleg Kh., Popova, Svetlana N., Lemachko, Aleksey N.Volume:
1084
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.1084.11
Date:
January, 2015
File:
PDF, 2.58 MB
english, 2015